SCOPE OF THE CONFERENCE

 

Nano and Micro Pattern Generation – Lithography:
UV, E-beam, X-ray, proton, resists

Nano imprint lithography:
Surface features, processes, materials…

Nano and Micro Replication:
Injection moulding, compression moulding, blow moulding, polymer and glass moulding, electroforming…

Micro and nano machining:
3D and surface structures, replication moulds…

Micro and Nano laser patterning:
Laser writing, laser ablation…

Metrology of Micro and nano structures:
Structural dimensions, mechanical and optical characteristics, surface characteristics…

Applications:
Mechanical, fluidic, optical electromagnetic…