HARMNST 2013 is the 10h International Workshop on High-Aspect-Ratio Micro-and Nano(new in 2013) Structure Technology.

This workshop continues a biennial tradition that began in 1995 and travels around the world (Europe, America, Asia).

This series has established itself as a premier, independent international event devoted to the advancement of high aspect ratio micro fabrication technologies and their applications. The goal of HARMNST is to bring together experts from academia and industry from various disciplines and regions who share their latest results of investigations and developments. Addressing a somewhat unique technical community, HARMNST aims at facilitating communications and discussions alongside dissemination, and sees itself as a workshop rather than a conference. HARMNST therefore sticks to a single-session format, and values oral and poster sessions equally.


1995 Karlsruhe, Germany
1997 Madison, Wisconsin, USA
1999 Chiba, Kisarazu, Japan
2001 Baden-Baden, Germany
2003 Monterey, California, USA
2005 Gyeongju, Korea
2007 Besançon, France
2009 Saskatoon, Canada
2011 Hsinchu, Taiwan